1, rotary vane vacuum pump
The rotor is installed in the pump casing with a certain eccentricity and is close to the fixed surface of the inner surface of the pump casing. Two (or more than two) rotary vanes are installed in the rotor slot. When the rotor rotates, the rotary vane can follow its radial slot. Sliding back and forth and always in contact with the inner wall of the pump casing, this rotor rotates with the rotor, and the pump chamber can be divided into several variable volumes. Rotary vane vacuum pumps are low vacuum pumps. It can be used alone or as a foreline pump for other high vacuum pumps or ultra-high vacuum pumps. Rotary vane pumps are mostly small and medium sized pumps and the products have been serialized. Rotary vane pumps are available in both single-stage and double-stage pumps, and are generally made in multiple stages to achieve higher vacuum levels. The vast majority of rotary vane pumps are single-working chamber structures. Two radial slides are commonly used and three oblique slides are also used. Through-slide vacuum pumps also have applications.
2ã€Spool valve vacuum pump
A sliding valve is arranged outside the eccentric rotor, and the rotation of the rotor drives the sliding valve to slide and roll along the inner wall of the pump casing. The sliding valve rod at the upper part of the sliding valve can slide in the swingable sliding valve guide to divide the pump chamber into two variables. Volume. The pumping principle of the spool type vacuum pump is similar to the rotary vane pump, but the structure of the two is different. Spool type vacuum pump is the use of slide valve mechanism to change the suction chamber volume, it is called the slide valve pump.
3, fixed-type vacuum pump
An eccentric rotor close to the inner surface of the pump is mounted in the pump casing, and a radial vane which is always in contact with the rotor surface is mounted on the pump casing. When the rotor rotates, the sliding vane can slide up and down to divide the pump chamber into two. Variable volume. Fixed-plate vacuum pumping speed is small, with single-stage and double-stage, and the ultimate vacuum of double-stage pump can reach 10-1Pa. The pump has a simple structure, a long service life and easy maintenance. However, due to its poor working performance as a rotary vane pump, it has rarely been produced and applied.
4, trochoidal vacuum pump
In the pump chamber, a rotor with a trochoidal profile is eccentrically mounted. It rotates along the inner wall of the pump chamber and divides the pump chamber into two variable volumes. The balance of the pump is good, so the pump runs more smoothly, the vibration is also small, the rotation speed can be increased, the size can be small, the pumping speed is large, and it is suitable for developing a mechanical vacuum pump with large pumping speed. As the suction line is short and thick, it helps to increase the pumping speed at low pressure. Therefore, the pumping speed characteristic curve of the trochoid pump in the low pressure range (1 to 100 Pa) is superior to that of the slide pump. The rotor and pump body of the trochoidal pump is a meshing motion of a pair of conjugate tooth pairs, so it is less sensitive to a certain amount of dust, small particles, etc. contained in the pumped gas. The trochoidal pump adapts to the higher temperature working environment, and the temperature of the pump chamber can be maintained at a relatively high temperature by the temperature control device (ie, it becomes a trochoidal heat pump) to pump out a large amount of condensable water vapor.
5, multi-room rotary vane vacuum pump
In a pump housing, a plurality of independent working chamber rotary vane vacuum pumps driven by the same motor are installed in parallel.
More vacuum pump information is available at China Vacuum Pump Trading Network (/).
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