The Expert Appraisal Committee, led by Academician Wang Yuming from the Chinese Academy of Engineering, announced today in Hangzhou Fuyang that China has made a significant breakthrough in the research and development of magnetic bearing technology. Zhejiang Feixuan Technology Co., Ltd. successfully developed the country's first magnetic bearing product—“FS450 molecular pump magnetic bearing based on cross feedback control.†This achievement marks a major milestone, breaking the long-standing foreign technological monopoly in the field of molecular pumps and positioning China as one of the few countries—alongside France, the U.S., Canada, and Germany—to possess independent intellectual property rights over magnetic bearing technology.
Magnetic bearings, also known as active magnetic bearings, are a cutting-edge type of high-performance bearing that eliminates mechanical contact between the rotor and stator. They consist of mechanical components, electronic control systems, sensors, and auxiliary bearings. By using electromagnetic force to suspend the rotor in mid-air, they offer numerous advantages such as no mechanical wear, low energy consumption, high allowable speed, low noise, long service life, and the absence of lubrication requirements. Integrating magnetic bearings into molecular pumps addresses critical issues caused by traditional oil-based lubrication, such as contamination in vacuum chambers. As a result, magnetic bearing vacuum molecular pumps have become the preferred choice for advanced integrated circuit manufacturing equipment and high-vacuum applications.
This innovation represents a revolutionary shift in the bearing industry, following the eras of oil and gas lubrication. It brings high-tech solutions to traditional industries and opens up vast opportunities in sectors like military, aerospace, petrochemicals, and energy. The research team led by Hong Shenping, CEO of Zhejiang Feixuan Technology Co., Ltd., pioneered the development of magnetic bearings specifically for integrated circuit equipment. They introduced a five-degree-of-freedom control magnetic suspension bearing for the first time and implemented cross-feedback control technology to address the gyroscopic effect of flexible rotors at high speeds, significantly improving rotor stability. Additionally, their motorized balancing technology effectively reduces rotor vibration, further enhancing performance and reliability.
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