In a major development announced this afternoon in Hangzhou Fuyang, the Expert Appraisal Committee led by Academician Wang Yuming of the Chinese Academy of Engineering revealed that China has made significant progress in the research and development of magnetic bearing technology. The breakthrough comes with the successful launch of the country’s first domestically developed magnetic bearing product—“FS450 Molecular Pump Magnetic Bearing Based on Cross Feedback Controlâ€â€”developed by Zhejiang Feixuan Technology Co., Ltd. This achievement marks a milestone, as it breaks the long-standing foreign technological monopoly in molecular pump applications, positioning China among a select group of nations—including France, the U.S., Canada, and Germany—that now possess independent intellectual property rights in magnetic bearing technology.
Magnetic bearings, also known as active magnetic bearings, represent a cutting-edge advancement in mechanical engineering. Unlike traditional bearings, they operate without physical contact between the rotor and stator, relying instead on electromagnetic forces to suspend the rotor in mid-air. This design offers numerous advantages: no mechanical wear, lower energy consumption, higher rotational speeds, reduced noise, extended service life, and the elimination of lubrication needs. By integrating magnetic bearings into molecular pumps, engineers can address critical issues related to vacuum integrity caused by oil-based lubrication, making magnetic bearing vacuum pumps the preferred choice for advanced semiconductor manufacturing equipment and high-vacuum systems.
This innovation is seen as a revolutionary step in the bearing industry, following the transition from oil-based to gas-lubricated systems. As a sophisticated mechatronic product, magnetic bearings have wide-ranging applications beyond vacuum pumps, including military, aerospace, petrochemical, and energy sectors. Their potential impact is vast, offering improved performance, reliability, and efficiency across multiple industries.
The R&D team at Zhejiang Feixuan, led by General Manager Hong Shenping, has pioneered the development of magnetic bearings tailored for integrated circuit manufacturing. For the first time, they implemented a five-degree-of-freedom control magnetic suspension system in a molecular pump, utilizing cross-feedback control technology to mitigate the gyroscopic effect of flexible rotors at high speeds, thereby enhancing rotor stability. Additionally, their motorized balancing technology significantly reduces rotor vibration, further improving the overall performance and durability of the system. This achievement not only strengthens China’s position in high-tech manufacturing but also signals a new era of innovation in precision engineering.
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